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Model Number |
CM-330 |
Features
- Prober Upward Mobility
- Small station footprint
- Massive 3" base
- ThumbDrive joystick
- 4 point platen lift
- Hardstop contact/separate
- 2"of platen range, with lock
- 10" crossroller bearing scope transport
- Stepped platen design
- Integrated CAP wiring
- Integrated connector bulkhead
Benefits
- Obvious upgrade benefit/advantage
- Fits in most existing 8" installations
- Minimize station flex/vibration
- Ultimate subμ control
- Planer lift, superior stability
- Insures repeatable contact point
- Supports ALL your fixtures, safely
- Strong enough for optical addons; SOM, EMMI, Laser
- Improved concurrent probe card & free probe applications
- Simple subμ upgrade path
- Stable tiepoints for cabling
Specifications
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X-Y Stage
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- - Travel
- - Resolution
- - Repeatability
- - Accuracy
- - Speed
- - Bearings
- - Stage Drive
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- 200mm/300mm
- 0.1μm
- 1.0μm
- 3.0μm
- 50mm/Sec
- Carriage & Rail
- DC Motors, Encoded
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Z Stage & Theta
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- - Z Range
- - Resolution
- - Repeatability
- - Contact/Separate
- - Theta Range
- - Resolution
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- Contact/Separate
- Pneumatic ↑↓
- 2.0μm
- 0.15"
- ±7.5 Degrees
- 0.35μm/0.55μm
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Chuck
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- - Diameter
- - Metallurgy
- - Vacuum
- - Flatness-Ambient
Thermal
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- 200mm/300mm
- Au/Ni Plated Al
- Multiple Zones
- < 6μm/8μm
- < 20μm/25μm
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Platen
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- - Z range
- - Contact/Separate
- - Lift
- - Metallurgy
- - Positioner Support
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- 2", Locking
- 0.15"
- 4 Pt. Leadscrew Driven
- Ni or Al
- Vac./Mag./Bolt-Down
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Microscope Transport
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- - Range
- - Resolution
- - Repeatability
- - Accuracy
- - Z-Lift
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- 2"x2"
- 0.1μm
- 2.0μm
- 10.0μm
- 4" Pneumatic
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